TSMC Says Low-NA EUV Will Carry It Further, Delaying High-NA Adoption

Yesterday, TSMC unveiled its latest A13 node preview at the North America Technology Symposium, highlighting the company's ongoing developments. However, the most significant news isn't about a new no

de but the technology behind it. TSMC announced it would rely on older ASML Low-NA EUV tools instead of the more expensive High-NA EUV scanners. With the High-NA EUV scanner priced at about €350 milli ...