ASML Provides Damage Assessment of Fire Incident, EUV Component Production Affected

ASML, makers of vital semiconductor fabrication machinery powering the world's leading fabs, including TSMC, provided its first damage-assessment of the fire incident at one of its component plants ne

ar Berlin, on January 3. This plant manufactures several mechanical and optical components of semiconductor fabrication machinery, such as wafer tables and clamps, reticle chucks and mirror blocks. A ...